After adding a 1.22/2 correction factor instead of using the 1/2 rule of thumb for resolution calculations the stack parameters are slightly off from the previously well tested value for 20x. Additionally the step size for 50x was way too big
Also need to consider how this fits into value line systems that might have different system level optical properties than the objective can theoretically do
After adding a 1.22/2 correction factor instead of using the 1/2 rule of thumb for resolution calculations the stack parameters are slightly off from the previously well tested value for 20x. Additionally the step size for 50x was way too big