Resized SWMMI Floorplans

SiEPIC / openEBL-2024-07-Si-Heaters

Submission for fabrication of silicon photonics for a SiEPIC openEBL run

https://siepic.ca/openebl/

MIT License

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Resized SWMMI Floorplans #108

Closed 11of12 closed 1 month ago

11of12 commented 1 month ago

Added an SEM image for each fill factor and one extra for the subwavelength taper. Resized the floorplan - this required me to split the test structures into two files for each parameter set.

11of12 commented 1 month ago

Merge Conflicts