Hi, I'd like to ask about DRC error regarding fin.
The related DRC rule is FIN.S.1
According to the Design Rule FIN.S.1, the exact vertical FIN pitch should be 27nm.
Design Rule for Fin
In the layout from the Virtuoso, the FIN pitch is exactly 27nm. But errors for the Design Rule FIN.S.1 occurs during the DRC.
My guess is that the DRC rule checker recognizes the white lines on the below picture as the center of the FIN.
But actually, the white lines on the picture are not center on the FIN.
In this case, is there any way to remove the DRC errors for the FIN.S.1?
In this layout, the green polygon is FIN and the blue polygon is M1.
The unit of ruler is um.
Hi, I'd like to ask about DRC error regarding fin. The related DRC rule is FIN.S.1 According to the Design Rule FIN.S.1, the exact vertical FIN pitch should be 27nm.
Design Rule for Fin
In the layout from the Virtuoso, the FIN pitch is exactly 27nm. But errors for the Design Rule FIN.S.1 occurs during the DRC. My guess is that the DRC rule checker recognizes the white lines on the below picture as the center of the FIN. But actually, the white lines on the picture are not center on the FIN. In this case, is there any way to remove the DRC errors for the FIN.S.1?
In this layout, the green polygon is FIN and the blue polygon is M1. The unit of ruler is um.