brief69
commented
10 months ago Reaction chamber: must be made of materials that can withstand high temperatures and a vacuum. Magnetron: Magnetron source for use in plasma generation. Gas supply system: gas cylinders, regulators, mass flow controllers, etc. Vacuum pump: controls the pressure in the reaction chamber. Vacuum gauge: device that measures pressure. Heating device: A device used to heat the reaction chamber or substrate. Thermocouple or temperature sensor: monitors temperature. Power supply: provides power to magnetrons and heating devices. Control system: microcontroller or computer to automatically control temperature, gas flow, and vacuum levels. Safety devices: gas leak detectors, overheat protection, fire suppression systems, etc. Seal flanges: rubber or metal seals to seal the reaction chamber. Wires and connectors: Wires to connect power sources and individual components.
Quartz tube or reaction chamber: where chemical reactions take place at high temperatures. Heating system: an electric furnace or induction heater to heat the quartz tube. Gas supply system: gas cylinders, regulators, and mass flow controllers. Vacuum pump: controls the pressure in the reaction chamber. Vacuum gauge: device used to measure pressure. Seal flange: makes the reaction chamber airtight. Thermocouple or temperature sensor: monitors and controls temperature. Controller: Computer or microcontroller to control temperature, gas flow, and vacuum levels. Gas analyzer (optional): analyzes components of outlet gas. Safety devices: gas leak detectors, overheat protection devices, etc.