Conversion fails after LIPC upgrade

demisjohn / ASML_JobCreator

Generate ASCII Job files for an ASML PAS 5500 Stepper Lithography system, by the UCSB Nanofabrication Facility.

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Conversion fails after LIPC upgrade #38

Closed demisjohn closed 2 years ago

demisjohn commented 2 years ago

Our system underwent LIPC upgrade, and now text jobs apparently have slightly different entries in the "Process_Data" section:

(Left is the new version, right is the previous version)

Not sure if our software version was updated. May need a way to dis/enable options for different software versions?

New (LIPC TestExport)/Old (Examples02) text files attached. New: 2022-07-21 LIPC TestExport.txt

Old: Example02test2.txt

demisjohn commented 2 years ago

FYI, ran "pas_recipe_export" on a "TestExposure" job file (binary) to generate the "LIPC" text file, and compared to our script-generated text files.

demisjohn commented 2 years ago

Manually added the above highlighted "WAFER_ALIGN_REPEATS" sections into the text file, and was able to get successful conversion + exposures on PAS tool (Miguel Daal). Will proceed to implement in export_lib.py

demisjohn commented 2 years ago

attempted fix in 2873d537ebc7bd7a1764bed72a3f3179b86e4dca, need to run a conversion and exposure to confirm it worked

demisjohn commented 2 years ago

Successfully converted Example02.txt on ASML PAS w/ pas_recipe_import & loaded into Batch/Queue successfully. Will try running on wafer next.

demisjohn commented 2 years ago

Job was able to run successfully on the system.