Do a couple basic things, like layer filling for 18nm np's (anything bigger should be less affected) with various intermediate layers. See what size/concentration range is necessary to affect the results appreciably, and see if silanes could have these properties.
Do a couple basic things, like layer filling for 18nm np's (anything bigger should be less affected) with various intermediate layers. See what size/concentration range is necessary to affect the results appreciably, and see if silanes could have these properties.