openrif / vivo-isf-ontology

The "VIVO-ISF Ontology" is an OWL2 representation of the VIVO-ISF Data Standard
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Term request: wafer bonder #673

Closed TenilleJohnson closed 7 years ago

TenilleJohnson commented 7 years ago

Description: An instrument that is used to bind two wafers together, typically by means of temporary bonding using a bonding agent or by permanent bonding of the oxide film surfaces using a self-bonding technique. Superclass: instrument

Requested by: eaglei@mail.med.upenn.edu