The capacitance can be efficiently and accurately calculated using the method described in [1].
[1] R. C. Jaeger, F. H. Gaensslen, and S. E. Diehl, “An Efficient Numerical Algorithm for Simulation of MOS Capacitance,” IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 2, no. 2, pp. 111–116, Apr. 1983.
The capacitance can be efficiently and accurately calculated using the method described in [1].
[1] R. C. Jaeger, F. H. Gaensslen, and S. E. Diehl, “An Efficient Numerical Algorithm for Simulation of MOS Capacitance,” IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 2, no. 2, pp. 111–116, Apr. 1983.