Open haoxingren opened 3 years ago
Hi Mark,
Yes, it will. In this simulation, we simply assume a periodic pattern with x period of maskxpitch and y period of maskypitch. Setting different mask pitch basically means the pattern period is changed although the mask pattern is same.
I guess you just want simulate an isolated mask pattern. In that sense, you can set a relatively large mask pitch.
Sorry for the later reply.
Bests, Wen
hi, I am experimenting with your package. It seems that maskxpitch/maskypitch in source and lens classes have a large impact on the final image. I noticed that by default those values are set as the xrange/yrange of the given mask. However, for the same mask, if I use different maskxptich and maskypitch, the calAI, calRI will create different arial and resist image. I wonder what is the meaning of maskxpitch and maskypitch and what is the correct way to set it if I need to simulate a large number of gds images with different sizes under the same condition?
thanks!
Mark